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Descriptor English: Microtechnology
Descriptor Spanish: Microtecnología
Descriptor Portuguese: Microtecnologia
Descriptor French: Microtechnologie
Entry term(s): Microfabrication
Microfabrications
Micromachining
Micromachinings
Micromanufacturing
Micromanufacturings
Microtechnologies
Tree number(s): H01.570
J01.897.520.500
RDF Unique Identifier: https://id.nlm.nih.gov/mesh/D055616
Scope note: Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.
Annotation:
Allowable Qualifiers: IS instrumentation
MT methods
SN statistics & numerical data
ST standards
Public MeSH Note: 2009
History Note: 2009
DeCS ID: 53362
Unique ID: D055616
Documents indexed in the Virtual Health Library (VHL): Click here to access the VHL documents
Date Established: 2009/01/01
Date of Entry: 2008/07/08
Revision Date: 2008/10/16
Microtechnology - Preferred
Concept UI M0518878
Scope note Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.
Preferred term Microtechnology
Entry term(s) Microfabrication
Microfabrications
Micromachining
Micromachinings
Micromanufacturing
Micromanufacturings
Microtechnologies



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