DeCS

Descriptor English:

Microtechnology

Descriptor Spanish:

Microtecnología

Spanish from Spain

Descriptor

microtecnología

Scope note:

Tecnología de fabricación de dispositivos microscópicos, del rango de micrómetros (típicamente 1-100 micras), como circuitos integrados o sistemas microelectromecánicos (MEMS). El proceso generalmente implica la duplicación y fabricación paralela de cientos o millones de estructuras idénticas usando diversas técnicas de depósito de finas películas y se realiza en salas limpias con control medioambiental.

Descriptor Portuguese:

Microtecnologia

Descriptor French:

Microtechnologie

Entry term(s):

Micro-fabrication
Micro-technologie
Micro-usinage
Microfabrication

Tree number(s):

H01.570
J01.897.520.500

RDF Unique Identifier:

https://id.nlm.nih.gov/mesh/D055616

Scope note:

Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.

Allowable Qualifiers:

IS instrumentation
MT méthodes
SN statistiques et données numériques
ST normes

DeCS ID:

53362

Unique ID:

D055616

NLM Classification:

QT 36.5

Documents indexed in the Virtual Health Library (VHL):

Click here to access the VHL documents

Date Established:

2009/01/01